Innovative Measurement Solutions
Omniscan
APPLICATIONS
-Nanoscale
surface science
-Nanoscale
topography
-Microscale
topography
-Flatness/Waviness
-Thin-film
characterisation
-Surface
manipulation
PRODUCTS
-DualScope
-MicroXAM
-MiniFIZ
-OSP100/500
-Alpha-Step/P-16+
-nkd7000/8000
-uPG101/DWL66
TECHNOLOGIES
-
SPM
-
White light interferometry
-
Laser interferometry
-
Laser/confocal scanning
-
Stylus profiling
-
Spectrophotometry
- Laser
lithography
MicroXAM – non-contact 3D surface profilometer
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MicroXM
3D surface
profiler.................................................Surface
roughness, waveiness and texture.
Measures roughness, finish and texture of surfaces ranging from highly polished optics, wafers and disk media to rough surfaces such as rolled steel and aluminum, paper, plastics, and ceramics. Characterize 3D microstructure such as micro-electronic mechanical systems (MEMs). Optional specialized applications are available, for example analysis of laser texture on disk media.
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MicroXM-RTS
sub-Angstrom
profiler.................................................MEMs
device
Physical features
Optical
microscope with eyepieces and video display of images
Computer
sensing of turret-based objectives allows easy change of
magnification
Autofocus simplifies measurements
Upgradeable
Pentium computer
Options include motorized stage controller,
various objectives, and multiple magnification wheel
Software features
Comprehensive
graphical software for the acquisition, analysis, manipulation
and visualization
Calculation of surface statistics
including summit and valley analysis
Fourier and
autocovariance analysis and surface filtering
Polynomial
fitting, data filtering, scaling, masking and interpolation
Interactive zoom
X-Y and line segment profiles
3D
wire, hybrid and solid plots
Area difference plot for step
height measurement
Fourier analysis for visualizing and
characterizing periodic structures in surface maps
Stitching
of measurements to form a large scale, high-density map