	Innovative Measurement Solutions Omniscan
HOME APPLICATIONS -Nanoscale surface science -Nanoscale topography -Microscale topography -Flatness/Waviness -Thin-film characterisation -Surface manipulation PRODUCTS -DualScope -MicroXAM -OptiFLAT -OSP100/500 -Alpha-Step/P-16+ -F10/20/30/40/50 -uPG101/DWL66 TECHNOLOGIES - SP M - White light interferometry - Laser/confocal scanning - Stylus profiling - Spectrophotometry - Laser lithography CONTACT Click on one of the above	P-16+ - Advanced Surface Profiling The Model P-16+ and P-16 OF+ (open frame) contact stylus profiler delivers automated step height, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials. This general-purpose programmable surface metrology tool is capable of being utilized in a wide range of applications and industries, from R&D departments and universities to production and process monitoring. Common applications include CMP monitoring and bump metrology (semiconductor), thin film step height and stress analysis (material science), thin film head structure definition (data storage), microlense and diffuser shape (optoelectronics), etch rates and trench depth analysis (MEMS) as well as surface characterization of a variety of micro and nano structures in materials that are used across many industries from the general surface machining to biomedical devices. Key P-16+ System Performance Features Best-in-class step height repeatability of 6.0Å or 0.1% (1s ) with sub-angstrom vertical resolution Small tabletop footprint with full 200 mm scan length capability (no stitching required) while supporting up to a 300 mm wafer or other large substrate configurations Enables process control and analysis of features at the Angstrom level up to approximately 1 mm in height Constant stylus force control to 0.05mg for “soft” surface measurements such as copper, gold and resist State-of-the-art Apex™2D and 3D surface analysis software with 3D stress, statistical process control and custom report generation features Unique design requiring movement of only the stage and not the head inducing less cyclical noise in to the scan therefore reducing measurement errors For more information click here Alpha-Step IQ - Compact Surface Profiling The Alpha-Step IQ is a state-of-the-art, stylus-based surface profiler that combines high measurement precision with versatility and economy. Ideal for applications such as semiconductor pilot lines and materials research, this advanced profiler enables faster process learning and higher yields. With guaranteed 8Å (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ provides excellent repeatability and performance to analyze and monitor processes. Key Alpha-Step System Performance Features Provides advanced and customizable 2D analysis capabilities. Enables easy location of measurement features via saved site image with recipe. Features excellent repeatability and reproducibility. Precisely determines and analyzes thin step heights, surface microroughness, and overall form error on thin film coatings. Provides sufficient vertical range for large topography variations. Includes multiple language support for users with a worldwide presence. Enables faster analysis routines by applying saved sets of analysis instructions For more information click here

Innovative Measurement Solutions

Omniscan

APPLICATIONS
-Nanoscale surface science
-Nanoscale topography
-Microscale topography
-Flatness/Waviness
-Thin-film characterisation
-Surface manipulation

PRODUCTS
-DualScope
-MicroXAM
-OptiFLAT
-OSP100/500
-Alpha-Step/P-16+
-F10/20/30/40/50
-uPG101/DWL66

TECHNOLOGIES
- SP M
- White light interferometry
- Laser/confocal scanning
- Stylus profiling
- Spectrophotometry
- Laser lithography

CONTACT

Click on one of the above

P-16+ - Advanced Surface Profiling

The Model P-16+ and P-16 OF+ (open frame) contact stylus profiler delivers automated step height, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials. This general-purpose programmable surface metrology tool is capable of being utilized in a wide range of applications and industries, from R&D departments and universities to production and process monitoring. Common applications include CMP monitoring and bump metrology (semiconductor), thin film step height and stress analysis (material science), thin film head structure definition (data storage), microlense and diffuser shape (optoelectronics), etch rates and trench depth analysis (MEMS) as well as surface characterization of a variety of micro and nano structures in materials that are used across many industries from the general surface machining to biomedical devices.

Key P-16+ System Performance Features

Best-in-class step height repeatability of 6.0Å or 0.1% (1s ) with sub-angstrom vertical resolution
Small tabletop footprint with full 200 mm scan length capability (no stitching required) while supporting up to a 300 mm wafer or other large substrate configurations
Enables process control and analysis of features at the Angstrom level up to approximately 1 mm in height
Constant stylus force control to 0.05mg for “soft” surface measurements such as copper, gold and resist
State-of-the-art Apex™2D and 3D surface analysis software with 3D stress, statistical process control and custom report generation features
Unique design requiring movement of only the stage and not the head inducing less cyclical noise in to the scan therefore reducing measurement errors

For more information click here

Alpha-Step IQ - Compact Surface Profiling

The Alpha-Step IQ is a state-of-the-art, stylus-based surface profiler that combines high measurement precision with versatility and economy. Ideal for applications such as semiconductor pilot lines and materials research, this advanced profiler enables faster process learning and higher yields. With guaranteed 8Å (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ provides excellent repeatability and performance to analyze and monitor processes.

Key Alpha-Step System Performance Features

Provides advanced and customizable 2D analysis capabilities.
Enables easy location of measurement features via saved site image with recipe.
Features excellent repeatability and reproducibility.
Precisely determines and analyzes thin step heights, surface microroughness, and overall form error on thin film coatings.
Provides sufficient vertical range for large topography variations.
Includes multiple language support for users with a worldwide presence.
Enables faster analysis routines by applying saved sets of analysis instructions

For more information click here